Okwu mmeghe nke microscopy eletrọn na-enyocha beam okpukpu abụọ (DB-FIB)

Akụrụngwa dị mkpa maka usoro microanalysis gụnyere: anya microscopy (OM), nyocha eletrọnịkị eletrọnịkị abụọ (DB-FIB), nyocha eletrọnịkị microscopy (SEM), na microscopy elektrọn nnyefe (TEM).Edemede taa ga-ewebata ụkpụrụ na ntinye nke DB-FIB, na-elekwasị anya n'ikike ọrụ redio na igwe onyonyo DB-FIB yana itinye DB-FIB na nyocha semiconductor.

Kedu ihe bụ DB-FIB
Dual-beam scanning eletrọn microscope (DB-FIB) bụ ngwá ọrụ na-ejikọta ion beam lekwasịrị anya na nyocha eletrọn anya n'otu microscope, ma nwee ngwa dịka gas injection system (GIS) na nanomanipulator, iji nweta ọtụtụ ọrụ. dị ka etching, ntinye ihe, nhazi micro na nano.
N'ime ha, ion ion beam (FIB) na-eme ka ion beam na-emepụta site na mmiri mmiri gallium metal (Ga) ion iyi, wee lekwasị anya n'elu ihe nlele ahụ iji mepụta akara electron nke abụọ, onye nchọpụta na-anakọta ya.Ma ọ bụ jiri ion ion siri ike dị ugbu a iji depụta elu nlele maka nhazi micro na nano;Enwere ike iji nchikota nke nshịkọ anụ ahụ na mmeghachi omume gas na-ahọpụtara ma ọ bụ tinye ọla na insulators.

Isi ọrụ na ngwa nke DB-FIB
Ọrụ ndị bụ isi: nhazi akụkụ nke ebe a kapịrị ọnụ, nkwadebe ihe atụ TEM, nhọrọ ma ọ bụ kwalite etching, ntinye ihe igwe na mkpuchi mkpuchi oyi akwa.
Ngwa ubi: DB-FIB na-eji ọtụtụ ihe na seramiiki ihe, polymers, metal ihe, bayoloji, semiconductor, geology na ndị ọzọ ubi nke nnyocha na metụtara ngwaahịa ule.Karịsịa, ikike nkwadebe ihe nlele pụrụ iche nke DB-FIB na-eme ka ọ bụrụ ihe a na-apụghị dochie anya na ike nyocha ọdịda nke semiconductor.

Ike ọrụ GRGTEST DB-FIB
DB-FIB nke Shanghai IC Test and Analysis Laboratory kwadoro ugbu a bụ usoro Helios G5 nke Thermo Field, nke bụ usoro Ga-FIB kachasị elu n'ahịa.Usoro a nwere ike nweta mkpebi nyocha eletrọn beam imaging n'okpuru 1 nm, ma bụrụkwa nke kachasị n'ihe gbasara arụmọrụ ion beam na akpaaka karịa ọgbọ gara aga nke microscopy eletrọn abụọ.Ejiri DB-FIB nwere nanomanipulators, sistemu injection gas (GIS) na ike dị iche iche EDX iji gboo mkpa nyocha nyocha nke ọdịda semiconductor dị iche iche.
Dị ka ngwá ọrụ siri ike maka nyocha nke ọdịda ihe onwunwe nke semiconductor, DB-FIB nwere ike ịrụ ọrụ nhazi akụkụ nke nanometer ziri ezi.N'otu oge nke nhazi FIB, a na-eji igwe eletrọn na-enyocha ya na mkpebi nanometer mee ihe iji hụ microscopic morphology nke mpaghara obe ma nyochaa ihe mejupụtara ya ozugbo.Nweta ntinye nke ihe ọla dị iche iche (tungsten, platinum, wdg) na ihe ndị na-abụghị ọla (carbon, SiO2);Enwere ike ịkwado mpekere TEM ultra-thin n'oge a kapịrị ọnụ, nke nwere ike izute ihe achọrọ maka nleba anya mkpebi dị elu na ọkwa atọm.
Anyị ga-aga n'ihu na-etinye ego na akụrụngwa microanalysis eletrọnịkị dị elu, na-aga n'ihu na-abawanye ma na-agbasa ikike nyocha nke ọdịda semiconductor, ma nye ndị ahịa azịza nyocha nyocha zuru oke na nke zuru oke.